Wafer Cleaning

Picture Name
Refer To

cleaning after wafer cutting. The cleaning type, flow rate, rotation speed, cleaning time, cleaning position and cleaning process can be set arbitrarily through the human-machine interface to achieve effective and efficient cleaning Size Width*Depth*Height 500mm x 600mm x 1600mm

Main process description

● Set the cleaning process and parameters through the human-machine interface ● Put the wafer into the cleaning tank manually, cover the cleaning cover, and press Start to start cleaning ● After cleaning, take out the wafer manually

Product advantages

The equipment is equipped with 3 types of nozzles (gas nozzle, two-fluid nozzle, one-fluid nozzle) at the same time. Through intelligent switching, the cleaning type can be switched without stopping. In addition to the standard high-pressure cleaning nozzle, you can also choose water vapor two-fluid cleaning, cleaning liquid cleaning, clean gas spraying, and drying

Compatible

The two-fluid cleaning method combining water and air

Classification:

Semiconductor Solutions

Product Details


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Wafer Glue Repair